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| Deposition and Etch Vacuum Chamber Thermal Management Solutions |
 Uncontrolled thermal gradients in a vacuum chamber substantially reduce process repeatability and wafer yields. The harsh environment including chemical, plasma, vacuum and temperature increases material and process contamination. One solution does not work for all vacuum-based applications. Watlow designs metal and ceramic heater and sensor components that are compatible with most vacuum environments. Watlow's new ceramic heaters include AIN and AIO3 based designs that offer precise high temperature pedestal heater solutions for bake stations and in-situ vacuum environments. Metal heaters can be incorporated into the walls and lid of vacuum chambers to prevent condensation. Pure aluminum and higher temperature stainless steel assemblies are also excellent solutions for many CVD, PVD and etch applications. Watlow is prepared to supply the complete turnkey thermal subassemblies for vacuum applications.
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Product Information
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